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Basic Sciences and Enabling Technologies
Atomic layer deposition of high-κ dielectric films for diamond MOS structures
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Basic Sciences and Enabling Technologies
DEFENDED PHD THESIS
Atomic layer deposition of high-κ dielectric films for diamond MOS structures
Aneeta Jaggernauth
Supervisors:
Joana Catarina Martins Mendes
, Rui Silva,
Joana Catarina Martins Mendes
University:
Universidade de Aveiro
Defense date:
7 / 2022
Keywords:
Abstract:
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