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Mass spectrometry improvement on an high current ion implanter

Lopes, J. ; Alegria, F. ; Redondo, ; Rocha, J. R. ; Alves, E. A.

Nucl. Instrum. Methods Phys. Res. B Vol. 269, Nº 24, pp. 3222 - 3225, December, 2011.

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Digital Object Identifier: 10.1016/j.nimb.2011.04.086

Abstract