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Nanoindentation analysis of Ga2O3 thin membranes produced by ion implantation and irradiated with Argon

Peres, M. ; Bdikin, I. ; Mendes, J. C. ; Esteves, D. ; Pereira, D. ; Alves, L. ; Alves, E. ; Santos, L. ; Lorenz, K.

Nanoindentation analysis of Ga2O3 thin membranes produced by ion implantation and irradiated with Argon, Proc European Materials Research Society (E-MRS) - Fall Meeting EMRS Fall, Varsaw, Poland, Vol. , pp. - , September, 2022.

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