@ARTICLE {8254,
author={Q.  Ferreira and A. Wemans Wemans and H. P. Marques Marques and C. Marques Marques and Q.  Ferreira and O.M.N.D. Teodoro Teodoro and E. Alves Alves and J. Maneira Maneira},
doi={10.1016/j.vacuum.2007.04.027},
journal={Vacuum},
title={Dual DC magnetron cathode co-deposition of (Al,Ti) and (Al,Ti,N) thin films with controlled depth composition},
year={2007},
month={August},
volume={81},
number={11-12},
pages={1503-1506},
ISSN={}
}
Create and download bib file