@ARTICLE {30170,
author={A.  Jaggernauth and J. C. Mendes and R. Silva},
doi={10.1039/D0TC02063J},
journal={Journal of Materials Chemistry C},
title={Atomic layer deposition of high-κ layers on polycrystalline diamond for MOS devices: a review},
year={2020},
month={September},
volume={8},
number={N.A.},
pages={13127-13153},
ISSN={2050-7534}
}