@INPROCEEDINGS {40335,
author={M.  Peres and I.  Bdikin and J. C. Mendes and D.  Esteves and D.  Pereira and L.  Alves and E.  Alves and L.  Santos and K.  Lorenz},
doi={},
booktitle={European Materials Research Society (E-MRS) - Fall Meeting EMRS Fall},
title={Nanoindentation analysis of Ga2O3 thin membranes produced by ion implantation and irradiated with Argon},
year={2022},
month={September},
volume={},
pages={-} 
}